List Master wafer, method of manufacturing the same, and method of manufacturing optical device by using the same Authors Joonyong Park, Dongouk Kim, Jihyun Bae, Bongsu Shin, Jong G. Ok, Ilsun Yoon, Sunghoon Lee, Jaeseung Chung, Sukgyu Hahm Country US patent Application# (Date) granted; US 10007124 B2 Category Patents Link https://patents.google.com/patent/US10007124B2 granted on Jun 26, 2018.
