Pattern manufacturing apparatus and pattern manufacturing method using the same

Authors

Useung Lee, Hyein Kim, Dong Kyo Oh, Jonggab Park, Nayeong Lee, Jong G. Ok

Country

WO PCT patent

Application# (Date)

PCT/KR2023/002174

Registration# (Date)

PCT/KR2023/002174

Category

Link

https://patents.google.com/patent/WO2023158201A1/en