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Semiconductor Processes and Materials

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Semiconductor Processes and Materials

Our research expands the boundary of semiconductor technology by pioneering innovative semiconductor processes and materials. Leveraging our expertise in optimizing CVD, PVD, and lithography processes, coupled with an in-depth understanding of diverse materials synthesis methods, we aim to create high-performance materials and microarchitectures as well as novel semiconductor fabrication processes. We also delve into the mechanism of semiconductor processes from the perspective of thermo- and fluid dynamics and materials mechanics. We keep translating our discovery into multidisciplinary applications for optoelectronic, optomechanical, and neurosignal sensors and transducers.