Publications OK SMART LAB

Method of transferring reverse pattern by using imprint process
Authors
Jaeseung Chung, Dongouk Kim, Joonyong Park, Jihyun Bae, Bongsu Shin, Jong G. Ok, Ilsun Yoon, Sunghoon Lee, Sukgyu Hahm
Journal
US patent
Vol
granted; US 10185218 B2
Year
Patents
granted on Jan 22, 2019.