Publications OK SMART LAB

Controlled airbrush coating of polymer resists in Roll-to-Roll nanoimprinting with regimented residual layer thickness
Authors
Sungkwan Koo, Sung Ho Lee, Jeong Dae Kim, Jung Goo Hong, Hyoung Won Baac, Moon Kyu Kwak, and Jong G. Ok
Journal
International Journal of Precision Engineering and Manufacturing
Vol. (No.), pp.
17 (7), 943-947 (Jul 2016)
Year
2020-2014
We study the effective resist dispensing in continuous Roll-to-Roll (R2R) nanoimprinting system by using a simple and controlled airbrush coating method. Compared to common spin-coating or drop-casting, airbrushing can better afford the continuous coating operation required in a R2R nanoimprinting system with controlled thickness and uniformity. We use a UV-curable epoxysilsesquioxane (SSQ) and propylene glycol methyl ether acetate (PGMEA) as a concentration control agent, which are airbrushed for a controlled time over a continuously fed flexible or rigid substrate in a R2R conveyer. The R2R nanoimprinting is successfully conducted with uniform pattern quality. By modulating the airbrushing time and resist concentration, the residual layer thickness (RLT) of R2R-imprinted patterns can be readily controlled for specific uses.