Photo–Roll Lithography (PRL) for Continuous and Scalable Patterning with Application in Flexible Electronics
- Journal
- Advanced Materials
- Vol. (No.), pp.
- 25 (45), 6554-6561 (Dec 2013)
- Year
- 2014-
A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo–roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask–substrate motions.