Publications OK SMART LAB

Photo–Roll Lithography (PRL) for Continuous and Scalable Patterning with Application in Flexible Electronics
Authors
Jong G. Ok, Moon Kyu Kwak, Chad M. Huard, Hong Seok Youn, and L. Jay Guo
Journal
Advanced Materials
Vol. (No.), pp.
25 (45), 6554-6561 (Dec 2013)
Year
2014-
A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo–roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask–substrate motions.