Continuous Patterning of Nanogratings by Nanochannel-Guided Lithography on Liquid Resists
- Journal
 - Advanced Materials
 
- Vol. (No.), pp.
 - 23 (38), 4444-4448 (Oct 2011)
 
- Year
 - 2014-
 
		
A nanochannel-guided lithography technique is developed that achieves continuous fabrication of higher aspect-ratio nanograting structures by adopting a cross-linkable liquid resist coating. Under the guidance of nanochannels in the grating mold, the UV-curable liquid resist is smoothly extruded and self-stabilized along the slightly inscribed solid substrate, dictated by the resist wettability to the substrate as well as the substrate topography.
	
    

