Publications OK SMART LAB

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces
Authors
Taejun Lee, Chihun Lee, Dong Kyo Oh, Trevon Badloe, Jong G. Ok, and Junsuk Rho
Journal
Sensors
Vol. (No.), pp.
20 (15), 4108 (Jul 2020)
Year
2020-2014
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.