"Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices"
Dong Kyo Oh, Wonseok Lee, Hyoungseok Chae, Hyunsoo Chun, Minyoung Lee, Dong Ha Kim, Joohoon Kim, Jaemin Choi, Sangwon Hwang, Minyong Park, Gyubeom Yeon, Sunmin Jung, Junsuk Rho, and Jong G. Ok
, Microelectronic Engineering
, 257, 111740 (Mar 2022)