"Scaling up the sub-50 nm-resolution roll-to-roll nanoimprint lithography process via large-area tiling of flexible molds and uniform linear UV curing"
Chang Ho Moon, Kang-Soo Han, Minwook Kim, Dong Kyo Oh, Sol Yi, Taehyun Kim, Hongkyu Kim, Jaehyun Hwang, Jung Gun Nam, Dong-Eon Lee, Dae-Young Lee, Gug Rae Jo, and Jong G. Ok
, Journal of Mechanical Science and Technology
, 37 (1), 271-278 (Jan 2023)