Publications OK SMART LAB

Method of transferring reverse pattern by using imprint process
Authors
Jaeseung Chung, Dongouk Kim, Joonyong Park, Jihyun Bae, Bongsu Shin, Jong G. Ok, Ilsun Yoon, Sunghoon Lee, Sukgyu Hahm
Country
US patent
Application# (Date)
granted; US 10185218 B2
Category
Patents
granted on Jan 22, 2019.