List Pattern manufacturing apparatus and pattern manufacturing method using the same Authors Useung Lee, Hyein Kim, Dong Kyo Oh, Jonggab Park, Nayeong Lee, Jong G. Ok Country WO PCT Application# (Date) PCT/KR2023/002174 (Feb 15, 2023) Category Patents Link https://patents.google.com/patent/WO2023158201A1/en published on Aug 24, 2023.
